The state-of-the-art TOF.SIMS 5 vacuum system guarantees high uptime and low maintenance costs. The vacuum system is fully computer controlled and interlock protected.
The ION-TOF buffer technology supersedes continuously running forepumps. It is built with magnetic bearing turbomolecular pumps and an oil-free diaphragm pump.
The internal bakeout option for the main chamber and the loadlock allows fast and easy internal cleaning of the instrument. Bad vacuum conditions or memory effects caused e. g. by organic material, can be removed overnight.
The internal bakeout of the main chamber uses heating devices inside the vacuum chamber. This option includes differential pumping of the time-of-flight analyser by an additional turbomolecular pump. Internal bakeout of the loadlock chamber uses heating devices inside the vacuum chamber.
The transfer system of the TOF.SIMS 5 is very flexible and allows all kinds of customised configurations.
A very useful option for improved sample throughput is the loadlock parking position.
This option allows to store up to two sample holders inside the loadlock to minimise transfer times especially for out-gassing samples.
The fully integrated buffer chamber is especially designed for the TOF.SIMS 5 - 300. The option allows maintaining excellent vacuum quality inside the main chamber during normal operation with multiple sample exchanges per hour.
The option includes the intermediate vacuum chamber between the loadlock and the main chamber. The chamber is equipped with two parking positions. Both parking positions allow storing of the standard small sample holder and also of full 300 mm wafers.
The chamber is also equipped with an internal bakeout system for fast and easy chamber cleaning.
TOF.SIMS 5 - 300 with fully integrated buffer chamber