The 5 axes, X, Y, Z, rotation and tilt of the macro stage give the flexibility to analyse all types of samples, not only flat surfaces. Rotation and tilt can be used to align any surface element for a perfect secondary ion extraction into the analyser, and can be used to analyse down holes in the samples.
The horizontal sample holder is important for the analysis of powders and other materials which are difficult to mount.
Besides the standard sample holders IONTOF offers customised sample holders for the analysis of special samples.
Special sample holder for the analysis of thick glass photo masks
Special sample holder for up to 36 thin sample pieces, e. g. silicon wafers
Special sample holder for the analysis of different hard disks