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The all new M6
Advanced Ion Beam Technology for Surface Analysis
The M6
SIMS technology one step ahead
The all new M6 TOF Analyser
New level of mass resolution and sensitivity
Mass resolution
beyond 30,000
Transmission, mass resolution and mass accuracy are the most essential figures of merit for a time-of-flight mass analyser. The M6 reflectron mass analyser features high transmission and high mass resolution. Both are achieved simultaneously and without compromise in positive and negative SIMS.

This new level of performance allows mass interferences of e.g. CH/13C, CH22/N containing molecules to be resolved even in the higher mass range, thus facilitating molecular peak identification.

Furthermore, the achievable mass accuracy is an important prerequisite for clear peak identification. The M6 mass analyser has a linear mass scale and provides superior mass accuracy of less than 10 ppm.

High resolution mass spectra demonstrating the new level of mass resolution in the low and high mass range.
Three times
higher sensivity
The revolutionary new design of the extraction optics and detection system also provides up to three times higher transmission. In combination with high repetition rates and the improved primary ion currents of the Nanoprobe 50, three times lower detection limits can be achieved in dual beam depth profiling.

The new developments also allow for up to three times faster imaging. Formerly time consuming image acquisitions take only a few minutes today.

With the patented extended dynamic range (EDR)analyser technology, seven orders of magnitude of dynamic range can be achieved. Intensities of more than 100 ions per pulse per mass with an excellent linearity and reproducibility can be recorded.
Depth profile of a boron NIST implant standard (SRM 2137).
Delayed Extraction Mode - Combining ultimate lateral resolution with high mass resolution
In conventional TOF-SIMS instruments the mass resolution depends on the pulse width of the primary ion source and hence the resulting acquisition time and image resolution. The delayed extraction mode of the M6 overcomes this restriction and combines maximum image resolution with high spectrometry performance in a unique way.
This allows for mass resolutions above 10,000 in combination with lateral resolutions below 50 nm. Previously this mass resolution was only achievable in a dedicated spectrometry mode with limited lateral resolution.

The delayed extraction mode also provides excellent performance on very rough samples and, in combination with the excellent depth-of-field of the M6 extraction optics, significantly reduces any topographic contrast.
Overlay: C4H9+(red), Na+(green), Al+(blue)
Primary ion: Bi3++, Field of view: 500 x 500 µm2,
Pixel size: 1 µm


Analysis of the fibre structure of a commercial adhesive bandage showing the surface distribution of C4H9 (red), Na (green) and Al (blue). The image nicely demonstrates the excellent depth-of-field of the M6 TOF analyser.



The height difference from the top of the fibres to the aluminium substrate is more than 300 µm. Nevertheless, the corresponding spectrum shows a good mass resolution with clear separation for inorganic and organic peaks.
Nanoprobe 50
The new benchmark in cluster ion beam technology
50 nm lateral resolution guaranteed and two times higher data rates
The Nanoprobe 50 is the latest generation bismuth cluster ion source for the M6. The source provides pulsed primary ion currents of up to 40 pA and an ultimate lateral resolution of well below 50 nm. The new bipolar bunching system can operate at repetition rates of up to 50 kHz, allowing for extremely high data rates and improved detection limits. The Nanoprobe 50 is the ideal primary ion source for high lateral resolution microanalysis and imaging as well as high mass resolution surface spectrometry and depth profiling.

50 nm lateral resolution guaranteed
40 nA DC current and up to 40 pA pulsed current
New bipolar bunching system for improved spectrometry performance and ease of operation
In-column measurement of mass separated, pulsed primary ion currents
Surface image showing the aluminium distribution on a standard test sample (L-200, provided by the German BAM). The image demonstrates a lateral resolution of less than 50 nm.

Primary ion: Bi3++, Field of view: 8 x 8 µm2, Pixel size: 15 nm
More flexibility and fully automated beam alignment
The new Nanoprobe 50 is also equipped with a high-precision aperture exchange system which provides a new level of flexibility in combination with fully automated beam alignment. The operator can select from nine different apertures, which are then quickly (less than 2 s) aligned with nanometer precision, to have the best source setup for the analytical task at hand.
Overlay: 12CN- (red), 13CN- (green), Si- (blue)

Surface image of 12C and 13C labelled Escherichia Coli Cells on silicon showing the surface distribution of 12CN, 13CN and Si. For the analysis the delayed extraction mode of the M6 TOF analyser was used to combine ultimate imaging resolution with a mass resolution above 10,000.

Primary ion: Bi3++, Field of view: 15 x 15 µm2, Pixel size: 60 nm
High-end Dual Beam Depth Profiling
 
From nm to µm – DSC, the high-performance work horse for inorganic depth profiling with O2 and Cs
The dual source ion column (DSC) is the new high current sputter source for all inorganic depth profiling applications. The ion optical column is equipped with two ion sources, an electron impact gas ion source for operation with O2, Ar or Xe and a thermal ionization caesium ion source.

The M6 can be operated at a repetition rate of up to 50 kHz in full interlaced mode which guarantees the highest possible data rates and optimum sample structure sampling.
The example shows a depth profile of a buried multilayer structure. Due to the high repetition rate the structure can be resolved despite of the high sputter rate (100 nm/min).
Quantitative depth profiling in MCs+ Mode
The MCs+ mode has become very popular in TOF-SIMS because it provides easy quantification on many inorganic sample systems. The M6 with its very high bismuth cluster current, high performance caesium sputter source and the advanced EDR technology is the perfect tool for this extremely powerful analysis mode.

IONTOF’s patented EDR technology uniquely allows the measurement of very high Cs+ intensities in parallel with low MCs+ intensities in order to compensate matrix effects and achieve better quantification, even on multilayer systems.
Gas Cluster Ion Source
 
The best solution for organic depth profiling
The use of large argon clusters as a sputter species in TOF-SIMS experiments allows depth profiling of organic materials to be carried out whilst retaining the intact molecular information. This makes the gas cluster ion source a powerful tool in the field of organic SIMS analysis.

Fully integrated solution optimised for dual and single beam depth profiling
Energy range of up to 20 keV
Analysis mode available
The example shows a SIMS depth profile through individual pixels of the organic layer structure of an OLED device.

Gas cluster analysis
Large argon cluster ions can also be applied as primary ion projectiles in TOF-SIMS. The unique IONTOF 90° pulsing system of the gas cluster source enables the generation of short primary ion pulses for high mass resolution surface spectrometry and allows the variation of the applied cluster size from 500 to 10,000 atoms/cluster.

This allows the study of the effects of using primary ion beams with an energy of down to 2 eV per cluster atom in detail and to investigate the influence of the cluster size on spectral appearance, the fragmentation and the secondary ion yield. The example shows an analysis of a polycarbonate sample using large argon clusters as primary ions with a beam energy of 20 keV.
The all new M6
made for industrial and academic research
Oxygen Cluster and FIB Applications
 
O2 cluster operation of the GCS
The M6 gas cluster source also supports oxygen cluster operation. The oxygen clusters extend the use of large gas clusters from organic applications to challenging inorganic sample systems. Excellent sputter rates in combination with the ability to maintain a high oxidation state even under cluster bombardment allows for high sensitivity inorganic depth profiling. Interesting applications are quantitative SiGe analysis or artefact free measurements of the Li, Na or K in-depth distribution in non-conductive materials such as glass or SiO2.

The example shows a comparison between the measured Li+ in-depth distribution inside a 200 nm SiO2 film using O2 or O2 cluster as sputter species. While the O2 cluster profile shows the in-depth distribution as expected, the O2 profile suffers from sputter beam induced Li migration.
Depth profile of a 7 keV lithium implant inside a 200 nm SiO2 layer using O2 or O2 clusters as sputter species.
Focused ion beam (FIB)
3D analysis of extremely rough samples, samples with voids and samples that exhibit strong local variations in density or sputter yield is almost impossible for conventional SIMS depth profiling. The FIB extension of the M6 allows the operator to overcome these limitations by combining FIB with high resolution SIMS imaging. In this setup a monoatomic Ga beam is used to mill a crater into the sample. The generated crater sidewall can then be imaged with the Nanoprobe 50 without moving the sample.
By serial slicing of the crater sidewall and intermediate imaging analysis full 3D tomography measurements can be performed.

Fully integrated hardware and software solution
No sample movement between milling and imaging required
Real-time monitoring of the milling process
Automated 3D tomography support
FIB crater sidewall and surface image of a lithium ion battery showing the distribution of O (blue), F (green) and C (red).
Three-dimensional tomography analysis of a lithium ion battery showing the distribution of lithium (grey) and sodium (red).
Sample Heating and Cooling
 
Ultra fast and efficient
closed-loop cooling system
The new sample heating and cooling system of the M6 combines unique performance with ease of operation. The closed-loop liquid nitrogen pumping system allows for push-button sample cooling operation in the analysis chamber and the load lock for more than 24 hours without user interaction.

The newly designed sample holder provides high flexibility in terms of sample size and permits full sample movement in all stage axes during sample cooling or heating.

Complete mobility of all stage axes incl. rotation and tilt
Allows for large area scans of cooled or heated samples
Extremely short cool down times
Low LN2 consumption (< 0.5 l/hour)
The example shows the temperature dependence of polystyrene oligomers. For the analysis the temperature was increased from -100 °C to 500 °C with a heating rate of 0.3 °C per second.
Intensity of different polystyrene oligomer signals as a function of sample surface temperature.

Surface spectra of the polystyrene sample at different temperature ranges.

SurfaceLab 7
 
Comprehensive interactive data analysis
SurfaceLab 7 is the most recent instrument operation, data acquisition and data analysis software for all IONTOF instruments. With this versatile software package IONTOF provides a professional solution for today‘s academic and industrial laboratories.

The extremely powerful interactive data analysis system makes time consuming data reconstruction obsolete and has revolutionised the way TOF-SIMS data is handled today. The software also includes a fully integrated Multivariate Statistical Analysis (MVSA) software package for spectra, images, depth profiles and 3D data.

Interactive data analysis
Fully integrated MVSA software package
Fully integrated spectra library
Advanced scripting and automation capabilities
As an example the MCR analysis of a sample consisting of stripe pattern from differently colored inks is shown. After performing a stage scan and running an automatic peak search consisting of more than 800 peaks representing almost 90% of the measured intensity the MCR routine included in Surfacelab 7 has been applied. As a result so-called score images which represent the lateral distribution of the different chemical substances is shown. From the example it is evident that MCR can clearly distinguish between the different inks on the sample.

In addition to the scores images corresponding loadings spectra are generated. These loadings spectra represent the chemical composition by showing the contribution of each secondary ion to the respective component i.e. chemical substance. Due to the full integration of the MVSA package into the SurfaceLab 7 software package and the interactive data analysis, the actual secondary ion image of a selected mass interval is displayed in the loadings plot.
Optical image
Field of view 5 x 5 mm2
Score images of different MCR components represent the lateral distribution of the different chemical substances.
Multivariate Statistical Analysis
MVSA refers to a set of statistical methods which examine relationships among multiple variables at the same time. It is often used to reduce the degree of complexity in a data set by reducing the number of variables without compromising the essential information. SurfaceLab 7 includes the following MVSA methods:

Principle Component Analysis (PCA)
Maximum Autocorrelation Factors (MAF)
Multivariate Curve Resolution (MCR)
The loadings plot shown corresponds to the yellow score image (i.e. black ink). The plot clearly illustrates that the masses 7 u, 88 u, and 120 u exclusively contribute to the black ink, whereas mass 58 u also originates from the blue ink.

By applying MVSA methods to huge data sets one can significantly reduce the degree of complexity making it easy to derive the major chemical components and their composition.
The M6 Hybrid SIMS
Surface analysis meets
organic mass spectrometry
Hybrid SIMS
 
Surface analysis meets organic mass spectrometry
With the Q ExactiveTM extension for the M6, IONTOF provides the first commercial SIMS instrument which combines the highest mass resolution (> 240,000) and highest mass accuracy (< 1 ppm) with high resolution cluster SIMS imaging.
The combination of the fast imaging capabilities of the TOF analyser with the unique performance of the Q ExactiveTM for unambiguous peak identification provides a new level of SIMS information from organic samples.
The new instrument extension also provides field proven, high-end MS/MS capabilities and sets a new benchmark for high resolution molecular SIMS applications.

Dual analyser configuration with TOF and OrbitrapTM
High resolution gas cluster imaging and spectrometry beyond the static SIMS limit
Mass resolution > 240,000 and < 1 ppm mass accuracy
High resolution MS/MS capabilities
The powerful combination of the gas cluster ion source and the OrbitrapTM analyser enables the distinction of different features even in highly complex organic samples.
For all spectra shown in the two examples the same level of mass resolution and mass accuracy is obtained. Both are a prerequisite for unambiguous peak identification.

The first example shows the analysis of a human bone section. Mass intervals representing the collagenous fibres within the bone marrow are shown in red. In blue, the distribution of C5H15NPO4+- is shown, corresponding to the phosphatidylcholine head group.
Courtesy of Kaija Schäpe and Dr. Marcus Rohnke
(University of Gießen, Germany)
The second example shows a high resolution structural analysis of a molecule used for OLED devices. The overview spectrum displays the full MS/MS information for the precursor ion C12N4F4 . The detail spectra show plots of different fragment ions.
TOF MS/MS
 
High transmission, high mass resolution precursor selection and MS/MS imaging
Time-of-Flight SIMS is an excellent technique for the characterisation of organic surfaces and layer systems. However, interpretation of organic spectra can be quite challenging and requires a reasonably experienced user. To facilitate data interpretation IONTOF provides different tools such as spectra libraries, a fully integrated Multivariate Statistical Analysis (MVSA) software package and the ultimate performance Q ExactiveTM extension for the M6, which provides highest mass resolution (> 240,000), highest mass accuracy (< 1 ppm) and high-end MS/MS.

With the new ToF MS/MS option IONTOF now also offers a more cost effective MS/MS solution for the M6. The option is ideally suited for quick confirmation of anticipated contaminants or compositions and fast MS/MS imaging or depth profiling applications. Key features of the new TOF MS/MS are:
High transmission (> 80%) and sensitivity
High mass resolution precursor selection to avoid MS2 fragmentation pattern interferences
Sequential, full MS1 and MS2 data streams with individually optimised analysis conditions
Fully automated multiple precursor MS/MS acquisition
No limitation for the MS1 performance regarding angular acceptance, transmission or mass resolution
The first example shows the MS/MS analysis of a mixture of tributyl citrate and glyceryl monostearate. Both molecules show a characteristic molecular peak at the same nominal mass. With the unique high mass resolution precursor selection it is possible to generate individual MS2 spectra of the different molecules and to avoid fragmentation pattern interferences.
The second example shows a high resolution MS/MS imaging analysis of Tinuvin 770 blooming on a small field of view (100 x 100 µm2), demonstrating the superior transmission of the IONTOF TOF MS/MS system.

The corresponding MS2 spectrum allows for the clear identification of characteristic molecular fragments.
MS2 spectra and MS2 image of Tinuvin 770.
Field of view: 100 x 100 µm2
The M6 Plus
The tool for nano characterisation
M6 Plus
 
A powerful platform for nano characterisation
Information concerning chemical composition, physical properties and the three-dimensional structure of materials and devices at the nanometre scale is of major importance for new developments in nanoscience and nanotechnology. In a 3D SIMS measurement the initial topography of the sample surface as well as topographic changes during the experiment cannot be easily identified.

Scanning Probe Microscopy (SPM) provides complementary information about the surface topography and can also be used to measure the physical properties of the analysed sample.

Through the combination of these two techniques true in-situ three-dimensional chemical imaging becomes possible.
The new M6 Plus platform combines the high-end performance of the M6 with the possibility to perform in situ SPM measurements. The SPM unit with its large scan range is ideally suited to provide topographic information for true 3D SIMS measurements.

All standard SPM modes e.g. AFM, MFM, KPFM, multi-frequency
Large SPM scan range of 80 x 80 x 10 µm3
Unique surface profiler mode for large SIMS sputter crater measurements
The piezo sample stage of the M6 Plus with sub-micron position accuracy ensures fast and precise movement between the TOF-SIMS and the SPM measurement position. The stage has a 10 nm encoder resolution and travel speeds of up to 10 mm/s which guarantees a new level of precision and stability.
3D overlay without topography correction: SiN (red), Ge (orange), SiO2 (yellow) and Si (green). Field of view: 25 x 25 µm2
3D overlay with topography correction: SiN (red), Ge (orange), SiO2 (yellow) and Si (green). Field of view: 25 x 25 µm2
Company
Innovative Ion Beam Technology for Surface Analysis
IONTOF is a manufacturer of innovative instruments for surface analysis with different product lines for time-of-flight secondary ion mass spectrometry (TOF-SIMS) and high-sensitivity low-energy ion scattering (LEIS).
Founded as a classical spin-off of the University of Münster, IONTOF has meanwhile become the technological leader in the field of TOF-SIMS and LEIS instrumentation
The company was founded by Prof. Alfred Benninghoven, Dr. Ewald Niehuis and Mr. Thomas Heller in 1989 to commercialise the original research carried out by Prof. Benninghoven and his team at the University of Muenster in Germany from the early 80's. Since the technique became commercially viable IONTOF has made many product improvements and more than 280 instruments are in operation in industrial and academic laboratories worldwide.
Today, the IONTOF group consists of four different companies. The IONTOF GmbH, which sells, produces and services all IONTOF analytical instruments. The IONTOF Technologies GmbH which is in charge of all R&D projects. The subsidiary IONTOF USA which was founded for sales and after sales service in the United States and the Swiss-based Nanoscan AG for all R&D projects in the field of SFM technology.
Support
IONTOF Customer Support
When help is needed there is no time to waste. For this reason, the IONTOF service department is available around the clock.
Regardless of whether you have to correct a malfunction, urgently need an answer to a specific question or need support for any other reason: Our service team is at your side when you need them to support you.
Use our contact finder to contact your local service technicians!

To solve your technical problems, please use our telephone, fax, email or online support:

+49 (0)251 1622-200
+49 (0)251 1622-199
 support@iontof.com
IONTOF Download Area



Link:  www.iontof-download.com

Access to our download area requires user name and serial number of a valid IONTOF software licence.
IONTOF Remote Support



Live Remote Assistance
If you already have a code from an IONTOF representative, enter it below to get started.
Type the code you received from your Service Engineer and click the Click Here button to proceed.

Disclaimer
Due to technical reasons, all chats with your service engineer are logged and kept available for 90 days.
Live Remote Assistance
Do you need a fast solution to a technical problem? Our engineers can quickly solve the majority of problems with a live remote-assistance tool. During remote support, a member of our support team can view your desktop and share control of your mouse and keyboard to get you on your way to a solution.

Note
You are in full control of your computer at all times. You always have overriding control of your mouse and keyboard, and you can end the screen-sharing session at any time.
How to get Support
A member of our support team will talk to you first to determine the nature of the problem. After discussing the problem, a support engineer will send you a code or a link to start your remote support session. Enter the code to get started fast!

How it Works
An IONTOF engineer will provide you with a unique connection code. You will then enter the code in the field and click "Click Here" to initiate the screen-sharing session.
You are prompted to download a small virus-free plug-in.
With your permission, your support representative can view your screen and share control of your mouse and keyboard.
FAQ
You will find the answers to security questions and system configuration requirements on our FAQ page. You can also view a demonstration of a screen-sharing session.
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For an IONTOF representative for you, please select the first of letter your country and then your country from the list.
 
Contact
IONTOF Headquarter



IONTOF GmbH
Heisenbergstraße 15
48149 Münster
Germany

+49 (0)251 1622-100
+49 (0)251 1622-199
IONTOF Support



To contact an IONTOF after sales service representative, please follow this link.

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For information about our products, please follow this popup link to send us your information request.

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How to find us
  By air
The local airport is the FMO (Flughafen Münster-Osnabrück). There are regular flights from Frankfurt, Munich and many other European airports to the FMO. Once you are at the airport you can take the shuttle bus to Münster Hauptbahnhof, take a taxi directly to IONTOF (about 40,- Euro one way) or rent a car. To go from the airport to IONTOF by car please follow the instructions below:

If the airport of your arrival in Germany is Düsseldorf, you may take a train direct from Düsseldorf Airport Railway Station to Münster Hauptbahnhof, frequent departures, journey time 1 ¼ hours.
Exit the airport and follow the blue signs to the highway (A1, BREMEN-DORTMUND).
Join the highway and drive south in direction DORTMUND.
Leave the highway at the exit for MÜNSTER NORD and drive in direction of Münster (B54, "Steinfurter Straße").
After 4.0 km on the B54 (at the traffic lights) turn right onto dual carriageway "Orleans-Ring".
After 400 m (at the next traffic lights) turn right onto "Apfelstaedtstraße".
After 400 m (at the next traffic lights) turn left onto "Corrensstraße".
Turn right onto "Heisenbergstraße" after 100 m, a small service road.
After 300 m you will find the IONTOF premises, the last building on your left hand side.

  By car
Münster can easily be reached by car via the highway A1 or A43. If you use the A43 join the A1 at MÜNSTER SUED and drive in direction BREMEN. If you use the A1 stay on the highway until you reach MÜNSTER NORD.

Leave the highway at the exit for MÜNSTER NORD and drive in direction of Münster (B54, "Steinfurter Straße").
After 4.0 km on the B54(at the traffic lights)turn right onto dual carriageway "Orleans-Ring".
After 400 m (at the next traffic lights) turn right onto "Apfelstaedtstraße".
After 400 m (at the next traffic lights) turn left onto "Corrensstraße".
Turn right onto "Heisenbergstraße" after 100 m, a small service road.
After 300 m you will find the IONTOF premises, the last building on your left hand side.
  By train
Go to Münster Hauptbahnhof and take a taxi from there to IONTOF (about 20 minutes one way).



IONTOF Directions as PDF file
Here you can download the directions as a pdf file.

Download    IONTOF Directions
Imprint / Impressum
 
IONTOF GmbH
Heisenbergstraße 15
D-48149 Münster
Germany

+49 (0)251 1622-100
+49 (0)251 1622-199
sales@iontof.com
Dr. Ewald Niehuis
HRB 10680
DE 814 795 257


Design & Programmierung
TOPHIE.NET - Christoph Schröer
Imprint (English Text)
Responsibility for Content
The contents of these pages are compiled with the greatest care. We do not, however, accept any responsibility for the accuracy, completeness or topicality of the contents. Furthermore IONTOF GmbH does not accept any responsibility for any losses caused by the usage or the distribution of these contents or any losses related to the usage or the distribution of these contents. IONTOF GmbH reserves the right to change or amend the content at any time.
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Our offer includes hyperlinks to external web sites. We have no influence over these web sites and therefore we do not accept any responsibility for their content. In each case the operators of the linked pages are responsible for their contents. The linked pages were checked for possible legal irregularities at the time of the establishment of the link. A permanent check of the linked pages is not possible without specific indications. If we are told about illegal content, the link will be removed immediately.
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Personal data
IONTOF GmbH is liable to the rules of the Bundesdatenschutzgesetz (BDSG). Through our web site, IONTOF GmbH will not collect any personal data about you (e.g. your name, address, telephone number or e-mail address), unless you voluntarily choose to provide us with it (information request). Your details will be used only by IONTOF GmbH, its subsidiaries, and its contracted agents. Under no circumstances will your details be given to any other organisation without your permission.
Impressum (Deutscher Text)
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Jeder Zugriff auf unsere Internetseiten wird protokolliert. Dabei erfassen unsere Web-Server automatisch Informationen allgemeiner Natur. Dazu gehören die Art des Webbrowsers, das verwendete Betriebssystem, der Domainname des Internet Service Providers, die IP-Adresse des verwendeten Computers, die Webseite, von der aus Sie uns besuchen, die Seiten, die Sie bei uns besuchen sowie das Datum und die Dauer des Besuches. Die Speicherung dient ausschließlich internen systembezogenen und statistischen Zwecken. Weitergehende personenbezogene Daten werden nur erfasst, wenn Sie diese Angaben freiwillig, etwa im Rahmen einer Anfrage, machen.
Personenbezogene Daten
IONTOF GmbH unterliegt den Bestimmungen des Bundesdatenschutzgesetzes (BDSG) dem zu Folge wird grundsätzlich die Anonymität des Nutzers während des Besuchs auf unseren Seiten gewahrt. Werden Ihre Kontaktdaten oder sonstige persönliche Daten benötigt, so werden wir Sie vorher darauf hinweisen. Diese Daten werden nur von IONTOF GmbH, Filialen von IONTOF und vertraglich gebundenen Agenten verwendet.
Privacy Policy
 
IONTOF GmbH is delighted that you have visited our website and thanks you for your interest in our company. At IONTOF GmbH, data protection has the highest priority. This document is designed to provide you with detailed information on the subject.
1. An overview of data protection
General
In the following we give a short overview of what happens to your personal information when you visit our website. Personal information is any data with which you could be identified personally. Detailed information on the subject of data protection can be found in below starting at section 2.

Data collection on our website

Who is responsible for the data collection on this website?
The data collected on this website are processed by the website operator. The operator's contact details can be found in the website's required legal notice (Imprint).
How do we collect your data?
Some data are collected when you provide it to us. This could, for example, be data you enter on a contact form or which you submit to us by telephone or e-mail. Other data are collected automatically by our IT systems when you visit the website. These data are primarily technical data such as the browser and operating system you are using or when you accessed the page. These data are collected automatically as soon as you enter our website.

What do we use your data for?
Part of the data is collected to ensure the proper functioning of the website. Other data can be used to analyse how visitors use the site. We provide data to public institutions such as fiscal authorities, billing offices, certified accountancts etc. if this is necessary in order to meet our legal obligations (e. g. legal obligation to obtain data).
What rights do you have regarding your data?
You always have the right to request information about your stored data, its origin, its recipients, and the purpose of its collection at no charge. You also have the right to request that it be corrected, blocked, or deleted. You can contact us at any time using the address given in the legal notice if you have further questions about the issue of privacy and data protection. You may also, of course, file a complaint with the competent regulatory authorities. The authority responsible for us is:
Landesbeauftragte für Datenschutz und Informationsfreiheit NRW
Kavalleriestraße 2-4, 40213 Düsseldorf
Tel. 0211-384240 erforderlich ist.

Analytics and third-party tools
When visiting our website, statistical analyses may be performed of your surfing behaviour. This happens primarily using cookies and analytics. The analysis of your surfing behaviour is usually anonymous, i.e. we will not be able to identify you from these data. You can object to this analysis or prevent it by not using certain tools. Detailed information can be found below.
We will inform you below about how to exercise your options in this regard.
2. General information and mandatory information
Data protection
We take the protection of your personal data very seriously. We treat your personal data as confidential and in accordance with the statutory data protection regulations and this privacy policy.
If you use this website, various pieces of personal data will be collected. Personal information is any data with which you could be identified personally. This privacy policy explains what information we collect and what we use it for. It also explains how and for what purpose this happens. Please note that data transmitted via the internet (e.g. via email communication) may be subject to security breaches. Complete protection of your data from third-party access is not possible.
Notice concerning the party responsible for this website
The party responsible for processing data on this website is:

IONTOF GmbH
Heisenbergstraße 15
48149 Münster
Germany
The responsible party is the natural or legal person who alone or jointly with others decides on the purposes and means of processing personal data (names, email addresses, etc.).
Revocation of your consent to the processing of your data
Many data processing operations are only possible with your express consent. You may revoke your consent at any time with future effect. An informal email making this request is sufficient. The data processed before we receive your request may still be legally processed.

Right to file complaints with regulatory authorities
If there has been a breach of data protection legislation, the person affected may file a complaint with the competent regulatory authorities. The competent regulatory authority for matters related to data protection legislation is the data protection officer of the German state in which our company is headquartered (North-Rhine Westphalia, NRW). A list of data protection officers and their contact details can be found at the following link: https://www.bfdi.bund.de.
Right to data portability
You have the right to have data which we process based on your consent or in fulfilment of a contract automatically delivered to yourself or to a third party in a standard, machine-readable format. If you require the direct transfer of data to another responsible party, this will only be done to the extent technically feasible.

SSL or TLS encryption
This site uses SSL or TLS encryption for security reasons and for the protection of the transmission of confidential content, such as the inquiries you send to us as the site operator. You can recognize an encrypted connection in your browser's address line when it changes from "http://" to "https://" and the lock icon is displayed in your browser's address bar.
If SSL or TLS encryption is activated, the data you transfer to us cannot be read by third parties.
Information, blocking, deletion
As permitted by law, you have the right to be provided at any time with information free of charge about any of your personal data that is stored as well as its origin, the recipient and the purpose for which it has been processed. You also have the right to have this data corrected, blocked or deleted. You can contact us at any time using the address given in our legal notice if you have further questions on the topic of personal data.
3. Data protection officer
Statutory data protection officer
We have appointed a data protection officer for our company. He can be contacted as follows:

Herr Heiner Niehüser
DSB Münster GmbH
Martin-Luther-King-Weg 42-44
48155 Münster
Germany
4. Data collection on our website
Cookies
Some of our web pages use cookies. Cookies do not harm your computer and do not contain any viruses. Cookies help make our website more user-friendly, efficient, and secure. Cookies are small text files that are stored on your computer and saved by your browser.

Most of the cookies we use are so-called "session cookies." They are automatically deleted after your visit. Other cookies remain in your device's memory until you delete them. These cookies make it possible to recognize your browser when you next visit the site.
You can configure your browser to inform you about the use of cookies so that you can decide on a case-by-case basis whether to accept or reject a cookie. Alternatively, your browser can be configured to automatically accept cookies under certain conditions or to always reject them, or to automatically delete cookies when closing your browser. Disabling cookies may limit the functionality of this website.

Cookies which are necessary to allow electronic communications or to provide certain functions you wish to use (such as the shopping cart) are stored pursuant to Art. 6 paragraph 1, letter f of DSGVO. The website operator has a legitimate interest in the storage of cookies to ensure an optimized service provided free of technical errors. If other cookies (such as those used to analyse your surfing behaviour) are also stored, they will be treated separately in this privacy policy.
Server log files
The website provider automatically collects and stores information that your browser automatically transmits to us in "server log files".
These are:

Browser type and browser version
Operating system used
Referrer URL
Host name of the accessing computer
Time of the server request
IP address
These data will not be combined with data from other sources.
The basis for data processing is Art. 6 (1) (f) DSGVO, which allows the processing of data to fulfil a contract or for measures preliminary to a contract.
Contact form
Should you send us questions via the contact form, we will collect the data entered on the form, including the contact details you provide, to answer your question and any follow-up questions. We do not share this information without your permission.

We will, therefore, process any data you enter onto the contact form only with your consent per Art. 6 (1)(a) DSGVO. You may revoke your consent at any time. An informal email making this request is sufficient. The data processed before we receive your request may still be legally processed.

We will retain the data you provide on the contact form until you request its deletion, revoke your consent for its storage, or the purpose for its storage no longer pertains (e.g. after fulfilling your request).
Any mandatory statutory provisions, especially those regarding mandatory data retention periods, remain unaffected by this provision.
Newsletter
Upon your explicit request we will send you our newsletter or similar information by e-mail. The corresponding registration is done by a double opt in procedure. The order of the newsletter will be saved, a confirmation will be sent by email and the receipt of the required reply will be saved. These data will only be used for the sending of the newsletter. It is possible to unsubscribe at any time.

Job applications
We accept job applications by e-mail but point out that the applicant is responsible for encryption. If an applicant is successful we will further use his personal data. Otherwise, the data will be deleted.

Hosting
We partly use external hosting for our website, for example for technical maintenance tasks. In such cases, our partners also use data gathered on this website if this is necessary for their tasks.
5. Plugins und Tools
Google Maps
For a graphic display of geographical information, we use Google Maps API. In this context, Google also collects, processes and uses data about the use of this map function by visitors of this website. Further information about Google's data processing can be found in their privacy policy (http://www.google.com/privacypolicy.html). There, you can also make personal privacy settings. We embed maps of "Google Maps" by the provider Google LLC, 1600 Amphitheatre Parkway, Mountain View, CA 94043, USA. Among the data processed in this context can be IP adresses and location details of the user which will however not be collected without their permission. It is possible that these data will be processed in the USA.
6. Changes
We reserve the right to make changes to this privacy policy in order to ensure that it always meets the current legal requirements or in order to include changes in our services.
Datenschutz
 
Die IONTOF GmbH freut sich sehr über Ihren Besuch unserer Webseite. Datenschutz genießt in unserem Unternehmen höchste Priorität. Im Folgenden möchten wir Sie daher mit den entsprechenden Details vertraut machen.
1. Datenschutz auf einen Blick (Zusammenfassung)
Allgemeine Hinweise
Die folgenden Hinweise geben einen Überblick darüber, was mit Ihren personenbezogenen Daten passiert, wenn Sie unsere Website besuchen. Personenbezogene Daten sind alle Daten, mit denen Sie persönlich identifiziert werden können. Ausführlichere Informationen zum Thema Datenschutz entnehmen Sie bitte diesem Text ab Abschnitt 2.

Datenerfassung auf unserer Website

Wer ist verantwortlich für die Datenerfassung auf dieser Website?
Die Datenverarbeitung auf dieser Website erfolgt durch den Websitebetreiber. Dessen Kontaktdaten können Sie dem Impressum dieser Website entnehmen.

Wie erfassen wir Ihre Daten?
Ihre Daten werden zum einen dadurch erhoben, dass Sie uns diese mitteilen. Hierbei kann es sich z.B. um Daten handeln, die Sie in ein Kontaktformular eingeben, uns telefonisch oder per E-Mail mitteilen. Andere Daten werden automatisch beim Besuch der Website durch unsere IT-Systeme erfasst. Das sind vor allem technische Daten (z.B. Internetbrowser, Betriebssystem oder Uhrzeit des Seitenaufrufs). Die Erfassung dieser Daten erfolgt automatisch, sobald Sie unsere Website betreten.

Wofür nutzen wir Ihre Daten?
Ein Teil der Daten wird erhoben, um eine fehlerfreie Bereitstellung der Website zu gewährleisten. Andere Daten können zur Analyse Ihres Nutzerverhaltens verwendet werden. Wir übermitteln Daten an öffentliche Stellen wie die Finanzverwaltung, Gebührenstellen, Wirtschaftsprüfer etc. sofern dies für die Erfüllung unserer der gesetzlichen Pflichten (z, B. Aufbewahrungspflicht)
Welche Rechte haben Sie bezüglich Ihrer Daten?
Sie haben jederzeit das Recht unentgeltlich Auskunft über Herkunft, Empfänger und Zweck Ihrer gespeicherten personenbezogenen Daten zu erhalten. Sie haben außerdem ein Recht, die Berichtigung, Sperrung oder Löschung dieser Daten zu verlangen. Hierzu sowie zu weiteren Fragen zum Thema Datenschutz können Sie sich jederzeit unter der im Impressum angegebenen Adresse an uns wenden. Des Weiteren steht Ihnen ein Beschwerderecht bei der zuständigen Aufsichtsbehörde zu. Die für uns zuständige Aufsichtsbehörde ist die Aufsichtsbehörde für das Land NRW:
Landesbeauftragte für Datenschutz und Informationsfreiheit NRW
Kavalleriestraße 2-4, 40213 Düsseldorf
Tel. 0211-384240 erforderlich ist.
Analyse-Tools und Tools von Drittanbietern
Beim Besuch unserer Website kann Ihr Surf-Verhalten statistisch ausgewertet werden. Das geschieht vor allem mit Cookies und mit sogenannten Analyseprogrammen. Die Analyse Ihres Surf-Verhaltens erfolgt in der Regel anonym; das Surf-Verhalten kann nicht zu Ihnen zurückverfolgt werden. Sie können dieser Analyse widersprechen oder sie durch die Nichtbenutzung bestimmter Tools verhindern. Detaillierte Informationen dazu finden Sie in der Datenschutzerklärung.
Über die Widerspruchsmöglichkeiten werden wir Sie in dieser Datenschutzerklärung informieren.
2. Allgemeine Hinweise und Pflichtinformationen
Datenschutz
Wir nehmen den Schutz Ihrer persönlichen Daten sehr ernst. Wir behandeln Ihre personenbezogenen Daten vertraulich und entsprechend der gesetzlichen Datenschutzvorschriften sowie dieser Datenschutzerklärung.
Wenn Sie diese Website benutzen, werden verschiedene personenbezogene Daten erhoben. Personenbezogene Daten sind Daten, mit denen Sie persönlich identifiziert werden können. Im Folgenden wird erläutert, welche Daten wir erheben und wofür wir sie nutzen. Wir erläutern auch, wie und zu welchem Zweck das geschieht.
Wir weisen darauf hin, dass die Datenübertragung im Internet (z.B. bei der Kommunikation per E-Mail) Sicherheitslücken aufweisen kann. Ein lückenloser Schutz der Daten vor dem Zugriff durch Dritte ist nicht möglich.
Hinweis zur verantwortlichen Stelle
Die verantwortliche Stelle für die Datenverarbeitung auf dieser Website ist:

IONTOF GmbH
Heisenbergstraße 15
48149 Münster
Verantwortliche Stelle ist die natürliche oder juristische Person, die allein oder gemeinsam mit anderen über die Zwecke und Mittel der Verarbeitung von personenbezogenen Daten (z.B. Namen, E-Mail-Adressen o. Ä.) entscheidet.
Widerruf Ihrer Einwilligung zur Datenverarbeitung
Viele Datenverarbeitungsvorgänge sind nur mit Ihrer ausdrücklichen Einwilligung möglich. Sie können eine bereits erteilte Einwilligung jederzeit widerrufen. Dazu reicht eine formlose Mitteilung per E-Mail an uns aus. Die Rechtmäßigkeit der bis zum Widerruf erfolgten Datenverarbeitung bleibt vom Widerruf unberührt.

Beschwerderecht bei der zuständigen Aufsichtsbehörde
Im Falle datenschutzrechtlicher Verstöße steht dem Betroffenen ein Beschwerderecht bei der zuständigen Aufsichtsbehörde zu. Zuständige Aufsichtsbehörde in datenschutzrechtlichen Fragen ist der Landesdatenschutzbeauftragte des Bundeslandes, in dem ein Unternehmen seinen Sitz hat. Für die IONTOF GmbH ist das Land NRW zuständig. Eine Liste der Datenschutzbeauftragten sowie deren Kontaktdaten können folgendem Link entnommen werden: https://www.bfdi.bund.de.
Recht auf Datenübertragbarkeit
Sie haben das Recht, Daten, die wir auf Grundlage Ihrer Einwilligung oder in Erfüllung eines Vertrags automatisiert verarbeiten, an sich oder an einen Dritten in einem gängigen, maschinenlesbaren Format aushändigen zu lassen. Sofern Sie die direkte Übertragung der Daten an einen anderen Verantwortlichen verlangen, erfolgt dies nur, soweit es technisch machbar ist.

SSL- bzw. TLS-Verschlüsselung
Diese Seite nutzt aus Sicherheitsgründen und zum Schutz der Übertragung vertraulicher Inhalte, wie zum Beispiel Bestellungen oder Anfragen, die Sie an uns als Seitenbetreiber senden, eine SSL-bzw. TLS-Verschlüsselung. Eine verschlüsselte Verbindung erkennen Sie daran, dass die Adresszeile des Browsers von "http://" auf "https://" wechselt und an dem Schloss-Symbol in Ihrer Browserzeile.
Wenn die SSL- bzw. TLS-Verschlüsselung aktiviert ist, können die Daten, die Sie an uns übermitteln, nicht von Dritten mitgelesen werden.
Auskunft, Sperrung, Löschung
Sie haben im Rahmen der geltenden gesetzlichen Bestimmungen jederzeit das Recht auf unentgeltliche Auskunft über Ihre gespeicherten personenbezogenen Daten, deren Herkunft und Empfänger und den Zweck der Datenverarbeitung und ggf. ein Recht auf Berichtigung, Sperrung oder Löschung dieser Daten. Hierzu sowie zu weiteren Fragen zum Thema personenbezogene Daten können Sie sich jederzeit unter der im Impressum angegebenen Adresse an uns wenden.
3. Datenschutzbeauftragter
Gesetzlich vorgeschriebener Datenschutzbeauftragter
Wir haben für unser Unternehmen einen Datenschutzbeauftragten bestellt. Er kann wie folgt kontaktiert werden:

Herr Heiner Niehüser
DSB Münster GmbH
Martin-Luther-King-Weg 42-44
48155 Münster
4. Datenerfassung auf unserer Website
Cookies
Die Internetseiten verwenden teilweise so genannte Cookies. Cookies richten auf Ihrem Rechner keinen Schaden an und enthalten keine Viren. Cookies sind kleine Textdateien, die auf Ihrem Rechner abgelegt werden und die Ihr Browser speichert. Sie dienen dazu, unser Angebot nutzerfreundlicher, effektiver und sicherer zu machen.

Die meisten der von uns verwendeten Cookies sind so genannte "Session-Cookies". Sie werden nach Ende Ihres Besuchs automatisch gelöscht. Andere Cookies bleiben auf Ihrem Endgerät gespeichert bis Sie diese löschen. Diese Cookies ermöglichen es uns, Ihren Browser beim nächsten Besuch wiederzuerkennen.
Sie können Ihren Browser so einstellen, dass Sie über das Setzen von Cookies informiert werden und Cookies nur im Einzelfall erlauben, die Annahme von Cookies für bestimmte Fälle oder generell ausschließen sowie das automatische Löschen der Cookies beim Schließen des Browsers aktivieren. Bei der Deaktivierung von Cookies kann die Funktionalität dieser Website eingeschränkt sein.

Cookies, die zur Durchführung des elektronischen Kommunikationsvorgangs oder zur Bereitstellung bestimmter, von Ihnen erwünschter Funktionen (z.B. Warenkorbfunktion) erforderlich sind, werden auf Grundlage von Art. 6 Abs. 1 lit. f DSGVO gespeichert. Der Websitebetreiber hat ein berechtigtes Interesse an der Speicherung von Cookies zur technisch fehlerfreien und optimierten Bereitstellung seiner Dienste. Soweit andere Cookies (z.B. Cookies zur Analyse Ihres Surfverhaltens) gespeichert werden, werden diese in dieser Datenschutzerklärung gesondert behandelt.
Server-Log-Dateien
Der Provider der Seiten erhebt und speichert automatisch Informationen in so genannten Server-Log-Dateien, die Ihr Browser automatisch an uns übermittelt.
Dies sind:

Browsertyp und Browserversion
verwendetes Betriebssystem
Referrer URL
Hostname des zugreifenden Rechners
Uhrzeit der Serveranfrage
IP-Adresse
Eine Zusammenführung dieser Daten mit anderen Datenquellen wird nicht vorgenommen.
Grundlage für die Datenverarbeitung ist Art. 6 Abs. 1 lit. f DSGVO, der die Verarbeitung von Daten zur Erfüllung eines Vertrags oder vorvertraglicher Maßnahmen gestattet.
Kontaktformular
Wenn Sie uns per Kontaktformular Anfragen zukommen lassen, werden Ihre Angaben aus dem Anfrageformular inklusive der von Ihnen dort angegebenen Kontaktdaten zwecks Bearbeitung der Anfrage und für den Fall von Anschlussfragen bei uns gespeichert. Diese Daten geben wir nicht ohne Ihre Einwilligung weiter.

Die Verarbeitung der in das Kontaktformular eingegebenen Daten erfolgt somit ausschließlich auf Grundlage Ihrer Einwilligung (Art. 6 Abs. 1 lit. a DSGVO). Sie können diese Einwilligung jederzeit widerrufen. Dazu reicht eine formlose Mitteilung per E-Mail an uns. Die Rechtmäßigkeit der bis zum Widerruf erfolgten Datenverarbeitungsvorgänge bleibt vom Widerruf unberührt.
Die von Ihnen im Kontaktformular eingegebenen Daten verbleiben bei uns, bis Sie uns zur Löschung auffordern, Ihre Einwilligung zur Speicherung widerrufen oder der Zweck für die Datenspeicherung entfällt. Zwingende gesetzliche Bestimmungen - insbesondere Aufbewahrungsfristen - bleiben unberührt.

Newsletter
Wenn Sie dies ausdrücklich wünschen, übersenden wir Ihnen unseren Newsletter oder ähnliche regelmäßige Informationen per E-Mail. Die Registrierung erfolgt durch ein Double-Opt-in-Verfahren. Hier werden die Bestellung des Newsletters gespeichert, eine Bestätigung per E-Mail versandt und der Eingang der notwendigen Antwort gespeichert. Diese Daten werden nur für den Versand des Newsletters versendet. Eine Abmeldung ist jederzeit möglich.
Bewerbungen
Wir akzeptieren Bewerbungen per E-Mail, weisen aber darauf hin, dass der Bewerber selbst ggf. für eine Verschlüsselung zu sorgen hat. Die von Bewerbern übermittelten persönlichen Daten werden im Falle einer Einstellung von uns weiterverarbeitet. Ansonsten werden die Daten der Bewerber gelöscht.

Hosting
Wir nutzen z. T: externe Hostinganbieter für unsere Website, z. B. für technische Wartungsarbeiten. Dabei werden auch von unseren Partnern auf dieser Website erhobene Daten verarbeitet, sofern dies für die Arbeiten erforderlich ist.
5. Plugins und Tools
Google Maps
Zur bildlichen Darstellung von geographischen Informationen verwenden wir Google Maps API. In diesem Zuge erhebt, verarbeitet und verwendet auch Google Daten über die Nutzung der Kartenfunktionen durch Besucher der Website. Weitere Informationen über die Datenverarbeitung durch Google finden Sie in den Google-Datenschutzhinweisen (http://www.google.com/privacypolicy.html). Dort können auch persönliche Datenschutz-Einstellungen vorgenommen werden. Wir binden die Landkarten des Dienstes "Google Maps" des Anbieters Google LLC, 1600 Amphitheatre Parkway, Mountain View, CA 94043, USA, ein. Zu den hierbei verarbeiteten Daten können insbesondere IP-Adressen und Standortdaten der Nutzer gehören, die jedoch nicht ohne deren Einwilligung erhoben werden. Es ist möglich, dass diese Daten in den USA verarbeitet werden.
6. Änderungen
Wir behalten uns Anpassungen der Datenschutzerklärung vor, damit sie immer den gültigen Rechtsanforderungen entspricht oder Leistungsänderungen in der Datenschutzerklärung Eingang finden.