IONTOF - TOF-SIMS (time of flight secondary ion mass spectrometry) - LEIS (low energy ion scattering). Ion beam technology products for surface spectrometry, surface analysis, depth profiling, surface imaging, 3D analysis, retrospective analysis

M6 - the ultimate SIMS machine

Advanced Ion Beam Technology for Surface Analysis

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JOBS: at IONTOF (m/w/d): Bestücker / Löter / Montierer Elektronik, Elektroniker für Geräte und Systeme, Full-Stack-Entwickler

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NEWS/EVENT: 04. - 11.07.2025 - Virtual IONTOF User School 2025, Online

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EVENT: 06. - 08.05.2025 - Top Analytica's 5^th Microscopy and Microanalysis Workshop, Turku, Finland

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NEWS: SurfaceLab 7.5 Release

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EVENT: 08. - 12.06.2025 - 2025 North American SIMS Workshop, California, USA

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NEWS: Dr. Alexander Pirkl honored with Peter Sherwood Mid-Career Award

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EVENT: 19. - 20.06.2025 - SISS 24 Japan, Egret Himeji, Himeji, Japan

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NEWS: Rivière Prize awarded to Morgan Alexander

M6 - SIMS technology one step ahead

The M6 is the latest generation of high-end TOF-SIMS instruments developed by IONTOF. Ground-breaking ion beam and mass analyser technologies make the M6 the benchmark in SIMS instrumentation and the ideal tool for industrial and academic research.

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Ground-breaking developments for the M6

The M6 TOF Analyser

The revolutionary design of the extraction optics, the ion transfer and detection system provides a new level of mass resolution, mass accuracy and transmission. This level of performance allows mass interferences of e.g. CH/¹³C, CH2/N containing molecules to be resolved even in the higher mass range, thus facilitating molecular peak identification.

In combination with high repetition rates and the improved primary ion currents of the Nanoprobe 50, three times lower detection limits can be achieved in dual beam depth profiling.

Its design has also been optimised for the measurements in the so-called delayed extraction mode making it the first TOF-SIMS instrument on the market to combine high resolution imaging with spot sizes below 50 nm with high mass resolution spectrometry.

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The Nanoprobe 50 is the latest generation bismuth cluster ion source for the M6. The source provides pulsed primary ion currents of up to 40 pA and an ultimate lateral resolution of well below 50 nm. The bipolar bunching system can operate at repetition rates of up to 50 kHz, allowing for extremely high data rates and improved detection limits. The Nanoprobe 50 is the ideal primary ion source for high lateral resolution microanalysis and imaging as well as high mass resolution surface spectrometry and depth profiling.

50 nm lateral resolution guaranteed

Bipolar bunching system for improved spectrometry performance and ease of operation

In-column measurement of mass separated, pulsed primary ion currents

The interpretation of organic TOF-SIMS spectra can be quite challenging and requires a reasonably experienced user. To facilitate data interpretation IONTOF provides different tools such as spectra libraries, advanced software package and the ultimate performance Orbitrap^TM extension for the M6. With the TOF MS/MS option IONTOF now also offers a more cost effective MS/MS solution for the M6. The option is ideally suited for quick confirmation of anticipated contaminants or compositions and fast MS/MS imaging or depth profiling applications. Key features of the TOF MS/MS are:

High transmission (> 80%) and sensitivity

High mass resolution precursor selection to avoid MS2 fragmentation pattern interferences

Sequential, full MS1 and MS2 data streams with individually optimised analysis conditions

Combining SIMS and SPM in situ

M6 Plus - The tool for nano characterisation

Information regarding the chemical composition, physical properties, and three-dimensional structure of materials and devices at the nanometre scale is crucial for new developments in nanoscience and nanotechnology. The M6 Plus platform combines the high-end performance of the M6 with the possibility to perform in situ SPM measurements making it the ideal tool for high-end nano characterisation.

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The M6 Hybrid SIMS

Hybrid SIMS - Surface analysis meets organic mass spectrometry

With the Orbitrap^TM extension for the M6, IONTOF provides the first commercial SIMS instrument which combines the highest mass resolution (> 240,000) and highest mass accuracy (< 1 ppm) with high resolution cluster SIMS imaging. The powerful combination of the gas cluster ion source and the Orbitrap^TM analyser enables the distinction of different features even in highly complex organic samples.

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High performance low energy ion scattering (LEIS)

Quantitative top atomic layer characterisation

With the Qtac IONTOF offers a high sensitivity Low Energy Ion Scattering (LEIS) instrument. The extreme surface sensitivity of LEIS makes the Qtac the perfect instrument to study surface processes in many production and research areas on materials such as catalysts, semiconductors, metals, polymers, and fuel cells.

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