The monitoring of organic contaminants becomes more and more important for the semiconductor industry. TOF-SIMS provides detailed inorganic and organic information about the wafer surface.
Possible sources of contaminants are:
Process Chemicals (photoresists, cleaning agents (POX, SOX, …)
Contact Contaminants (gloves, tools, wafer holders, …)
Cleanroom Contaminants (filter-related components, adsorbates, ...)
Packing Materials (wafer boxes, ...)