The Qtac can also be equipped with a high brightness primary ion source. The source replaces the standard gas ion source and allows for LEIS imaging with a lateral resolution of down to 5 µm.
The main advantage of the higher lateral resolution is the possibility to identify smaller features on the sample surface and reconstruct spectra information from individual surface areas.
In the example a Ti, Pb, Sn pattern structure was measured. After the measurement, retrospective data processing was used to reconstruct separate LEIS surface spectra from the Ti substrate and the Pb and Sn containing pad region.