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Principle of LEIS In LEIS analysis the sample surface is bombarded with noble gas ions at an energy of a few keV. The ions are scattered by the atoms of the surface following the laws of the conservation of energy and momentum. By measuring the energy of the backscattered ions the masses of the scattering surface atoms are determined. With the advanced analyser design of the Qtac100 the measured intensity is directly proportional to the surface coverage of the corresponding element and is not influenced by the chemical environment. This allows matrix independent quantification.   |
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Scattering of noble gas ions by surface atoms Energy spectrum of the scattered ions corres- ponding to the masses of the surface atoms |